Manufacturing of optoelectronic devices

ABSTRACT

A method for manufacturing optoelectronic devices is disclosed. A layered structure may be formed with a plurality of layers including a bottom electrode layer, a top electrode layer, and one or more active layers between the top and bottom electrode layers. The layered structure is divided into one or more separate device module sections by cutting through one or more of the layers of the layered structure. At least one of the layers is an unpatterned layer at the time of cutting. Each of the resulting device module sections generally includes a portion of the active layer disposed between portions of the top and bottom electrode layers. An edge of a device section may optionally be protected against undesired electrical contact between two or more of the bottom electrode, top electrode and active layer portions. Two or more device module sections may be assembled into a device and connected in series by electrically connecting the bottom electrode layer portion of one device section to the top electrode layer portion of another device module section.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.12/245,735 filed on Oct. 4, 2008 which is a continuation of U.S. patentapplication Ser. No. 11/549,944 entitled “Manufacturing ofOptoelectronic Devices”, filed on Oct. 16, 2006 which is a continuationof U.S. patent application Ser. No. 10/810,072 entitled “Manufacturingof Optoelectronic Devices”, filed on Mar. 25, 2004. This application isfully incorporated herein by reference for all purposes.

FIELD OF THE INVENTION

This invention is related to manufacturing of optoelectronic devices andspecifically to methods for roll-to-roll manufacturing of optoelectronicdevice modules on flexible foil substrates.

BACKGROUND OF THE INVENTION

Optoelectronic devices interact with radiation and electric current. Theinteraction can be photoelectric where the device converts incidentradiant energy (e.g., in the form of photons) into electrical energy.Optoelectronic devices often tend to be high voltage and low currentdevices. Currently many optoelectronic devices, e.g., thin-filmphotovoltaic (PV) cells and organic light-emitting diodes (OLEDs) aremade by depositing patterns of material on a substrate to form thevarious device layers, e.g., a bottom electrode, an active layer stackand a top electrode (plus auxiliary layers), of individual devices. Forexample, in the case of PV cells, typically all the bottom and topelectrodes as well as the active PV layer stack are patterned to createindividual PV cells that are later series-wired. The patterning istypically done via laser or mechanical scribing, or photolithographicpatterning. This patterning adds extra processing steps and oftenintroduces complications that can reduce the yield of useful devices.For example, laser patterning or mechanical scribing may result in acondition known as overscribing where the scribing cuts too deeply intoone or more layers. Similarly, such scribing techniques may result inunderscribing where the scribing does not cut sufficiently deep into oneor more layers. Furthermore, many scribing techniques can generatedebris that may be inadvertently and undesirably incorporated into thefinished devices. All of these effects may interfere with proper deviceperformance or cause catastrophic failure of devices and thereby add tothe overall cost of useful devices.

Furthermore, certain conventional thin-film PV cells, e.g.Mo/CIGS/CdS/TCO or TCO/CdS/CdTe/top metal or stainlesssteel/insulator/metal/a-Si PV stack/top TCO, require patterning stepsand may also need insulators on metal foil substrates. Techniques forsingulation into individual cells, e.g., laser scribing, often can notbe used on such cells because of the associated risk of also cutting theunderlying bottom electrode (e.g. Mo).

Thus, there is a need in the art, for a method for manufacturingoptoelectronic devices that overcomes the above disadvantages.

BRIEF DESCRIPTION OF THE DRAWINGS

The teachings of the present invention can be readily understood byconsidering the following detailed description in conjunction with theaccompanying drawings, in which:

FIGS. 1A-1B are cross-sectional schematic diagrams illustratingmanufacture of optoelectronic devices according to an embodiment of thepresent invention.

FIG. 1C is a cross-sectional schematic diagram of a portion of anoptoelectronic device illustrating a scheme for making electricalcontact with a bottom electrode disposed on an insulating substrateaccording to an embodiment of the present invention.

FIGS. 2A-2D are three-dimensional schematic diagrams illustrating analternative scheme for series connecting optoelectronic devicesaccording to an embodiment of the present invention.

FIGS. 3A-3B are three-dimensional schematic diagrams illustrating analternative scheme for dividing a layered structure into separateoptoelectronic device sections and series connecting the optoelectronicdevices according to an embodiment of the present invention.

FIG. 4 is a three-dimensional schematic diagram illustrating anotheralternative scheme for dividing a layered structure into separateoptoelectronic device sections and series connecting the optoelectronicdevices according to an embodiment of the present invention.

FIGS. 5A-5B are three-dimensional schematic diagrams illustratinganother alternative scheme for dividing a layered structure intoseparate optoelectronic device sections according to an embodiment ofthe present invention.

DESCRIPTION OF THE SPECIFIC EMBODIMENTS

Although the following detailed description contains many specificdetails for the purposes of illustration, anyone of ordinary skill inthe art will appreciate that many variations and alterations to thefollowing details are within the scope of the invention. Accordingly,the exemplary embodiments of the invention described below are set forthwithout any loss of generality to, and without imposing limitationsupon, the claimed invention.

Optoelectronic devices may be manufactured less expensively and bycutting an unpatterned (or substantially unpatterned) layered structureinto individual sections. According to embodiments of the presentinvention, an optoelectronic device may be manufactured in aroll-to-roll fashion with at least one but preferably more if not all ofthe individual layers that would normally be patterned being notpatterned. Instead, a layered structure is formed, e.g., by one or morethin-film layer depositions. The layered structure is cut entirely intoindividual separated sections, e.g., stripes (preferably in a lengthwisedirection) and then assembled into a module (e.g. by lamination),together with back-to-front series wiring.

For example, FIG. 1A illustrate cross-sections depicting optoelectronicdevices at different stages of fabrication according to embodiments ofthe present invention. In FIG. 1A, a layered structure 100 may be formedwith, among other layers, a substrate 102, a bottom electrode layer 104(102 and 104 could optionally be combined into one), one or more activelayers 106, and a top electrode layer 108. Generally speaking, it isdesirable that at least one, and possibly both, of the bottom and topelectrodes 104, 108 are light-transmitting, e.g., transparent or atleast translucent to radiation over some wavelength range of interest.It is also desirable to fabricate the structure using layer formationtechniques that are compatible with roll-to-roll processing with thesubstrate 102 being a long continuous sheet that passes through one ormore layer formation stages in sequence as the other layers are formedon top of it.

To fabricate a plurality of series-connected optoelectronic devicemodules from the layered structure 100, one or more of the layers of thelayered structure 100 may be cut through as indicated by the arrows todivide the layered structure into one or more separate device sections101A, 101B, each having substrate layer portions 102A, 102B, bottomelectrode layer portions 104A, 104B, active layer portions 106A, 106Band top electrode layer portions 108A, 108B as shown in FIG. 1B. Atleast one of the layers 104, 106 or 108 is an unpatterned layer at thetime of cutting. In a preferred embodiment, all or nearly all of thelayers of layered structure 100 are wherein at least one of the layersis an unpatterned layer at the time of cutting. The layered structure100 may be cut lengthwise (i.e., along the web direction in aroll-to-roll processing context) into strips by any suitable means,e.g., conventional mechanical cutting such as with a knife, blade,scissors or cutting wheel, cutting by water jet, abrasive particle jet,or laser cutting with a suitable laser such as an excimer/UV, IR (e.g.,CO₂, solid-state, etc.) laser. Additional optional layers, not shownhere, may be present in the device 100; such layers may be oxygen and/ormoisture barrier layers, light input/output coupling layers, generallysurface passivating layers, etc.

The cutting process may compress (smear, melt or partially melt, causeparticulates, etc.) the layers of the layered structure together causingundesirable contact between non-adjacent layers, e.g., the top andbottom electrode layers 104, 106. It is important to guard against suchcontact, which could reduce the yield of useful devices. One possibleway to protect against undesired inter-layer contact during cuttingwould be to place strips of, e.g., electrically insulating,short-proofing material 110, e.g., oxide, nitride, polymer, etc. betweenthe top electrode layer 108 and the active layers 106 at the locationswhere the layered structure 100 is to be cut. The strips ofshort-proofing material 110 protect against undesired contact as thelayered structure 100 is cut. The short-proofing layer material 110could be deposited onto the layered structure 100 at various stepsbefore and/or during and/or after the roll-to-roll manufacturing e.g. byprinting techniques (ink-jet, screen, flexographic, etc.), co-extrusion,laminating, inserting tape or adhesive tape, and the like. The shortproofing material 110 could be liquid (e.g., polymers or monomers), orpaste, composite, that is, e.g., thermally and/or UV-cured or dried.Alternatively, the short-proofing materials could be adhesive insulatingtapes or could be pressure or heat-sensitive (e.g.meltable/reflowable/bondable thermoplastics) laminated tapes withoutadhesive. In addition, the short proofing material 110 could also bemade from patterned inorganic insulators deposited by e.g. evaporation,sputtering, CVD, etc. techniques with or without additional patterningsteps such as lithography. The short proofing material could be placedbetween one or more layers, e.g. between layers 106 and 108 (as shown)and/or between 104 and 106.

Another possible way to protect against undesired inter-layer contactis, after cutting, to passivate the now exposed sides of the devicemodules to form a passivated layer 114 that inhibits undesiredinter-layer electrical contact. For example, the sides of the devicemodules may be passivated by thermal oxidation, exposure to passivatingchemicals, activated oxygen (from e.g. a plasma or UV-ozone), oxidizingprecursor chemicals, etc. (gas, liquid, etc.), coating the sides (e.g.by laminating, taping, printing, extruding, techniques) with apassivating substance (e.g. UV/thermally curable polymer/liquid).Generally, the passivating material/process is one that rendersconductive or semi-conductive potentially shorting materials/debris fromthe cutting step into a form that is less conductive or substantiallyinsulating such that cutting-induced shorting is reduced or eliminated.Such an optional passivating layer 116 (e.g. a printed or laminatedlayer) could also assist to prevent cell electrical shorting during theback-to-front series wiring process, and layer 116 may also be used incombination with short proofing layer(s) 110.

Each device section has a portion of the active layer 106A, 106B,disposed between portions of the top electrode layer 108A, 108B andbottom electrode layer 104A, 104B. The individual device sections 101A,101B may be electrically connected in series, e.g., by electricallyconnecting the bottom electrode layer portion 104A of one device section101A to the top electrode layer portion 108B of another device section101B with electrically conducting pathways 112, e.g., metal tapes,wires, meshes, grids, printed conductive inks and the like. Theconducting pathways 112 may typically be bonded to the top electrodeportion 108B and bottom electrode portion 104A by, e.g., conductiveadhesives, soldering, laser-welding, and the like.

Two or more of the device sections 101A, 101B may be assembled into amodule, e.g., by laminating them between layers of encapsulantmaterials. Examples of suitable encapsulant materials include one ormore layers of polymers, such as polyethylene terephthalate (PET),ethylene vinyl acetate (EVA), and/or Mylar®. Mylar is a registeredtrademark of E. I. du Pont de Nemours and Company of Wilmington, Del.Inorganic materials, such as glass and plastic foils, metalized plasticfoils, and metal foils may also be used for the encapsulant layer. Theencapsulant layer may also include nitrides, oxides, oxynitrides orother inorganic materials. Alternatively, the encapsulants may includeTefzel® (DuPont), tefdel, thermoplastics, polyimides, polyamides,Aclam/Aclar (trade names of products marketed by Honeywell, Inc.),nanolaminate composites of plastics and glasses (e.g. barrier films),and combinations of the above. For example, a thin layer of (expensive)EVA/polyimide laminated to thick layer of (much less expensive) PET

The substrate 102 may be any suitable material, e.g., plastic, metal,glass, ceramic, etc. It is desirable to fabricate the device using aflexible material as the substrate 102. By way of example, the substrate102 may be a plastic foil such as PET, Mylar, PEN, polyimide, PESor thelike. The bottom electrode layer 104 may be a coating of metal, such asmolybdenum, deposited on an upper surface of the substrate 102, e.g., bysputtering. The substrate 102 may be pre-coated with the bottomelectrode layer 104, e.g., in the case of a metalized plastic foil orindium tin oxide (ITO) coated glass. Alternatively, the substrate 102may be made from an electrically conducting foil, such as stainlesssteel, Al, Mo, etc. Where the substrate 102 is electrically conductive,the substrate 102 may serve as the bottom electrode layer 104 and aseparate bottom electrode layer is optional. Note that this also appliesto the discussion of the embodiments that follow.

In an alternative embodiment, a conductive or insulating substrate 102may be coated with an optional insulating smoothing layer thatsubstantially covers all or most of the surface roughness of substrate102, followed by the deposition of a conductive bottom electrode 104.Said smoothing layer could e.g. be a solution-processed precursormaterial that converts into an oxide (e.g. a spin-on-glass typematerial), an organic material, an organic polymeric material or asputtered or CVD-processed oxide, nitride or oxy-nitride.

In another embodiment, a conductive or insulating substrate 102 may becoated with an optional conductive smoothing layer (for example aconductive polymer), which may act as electrode 104 or said conductivesmoothing layer may be followed by the actual electrode 104.

In yet another embodiment, a conductive substrate 102 (e.g. a metalfoils such as a stainless steel or Al foil) may be followed by a partialinsulating smoothing layer. This smoothing layer is partial in that saidsmoothing layer, via its wetting properties and/or thickness, leaves afraction of the tops of the (rougher) conductive substrate 102 exposedsuch that a subsequently deposited electrode 104 makes electricalcontact through the partially covering smoothing layer through to theconductive substrate 102. In this embodiment, the thickness requirementsfor the electrode layer 104 are reduced as low resistivity issubstantially provided through the conductive substrate 102.

In cases where the substrate 102 is made from an insulating material,e.g., PET or polyimide and the like, it is often desirable to makeelectrical contact to the bottom electrode layer, e.g., for serieswiring. In such a case, such desirable electrical contact may befacilitated as shown in FIG. 1C. A bottom electrode layer 104C may beformed on one side of a substrate 102C having a plurality of vias 116formed therethrough, e.g., by laser drilling, lithographic etching, orother techniques and filled with electrically conductive material, e.g.,a metal such as molybdenum, aluminum, copper and the like. The vias 116may be formed and/or filled either before or after the bottom electrodelayer 104C. An electrically conducting bus bar or contact layer 120 maythen be formed on an opposite of the substrate 102C such that thesubstrate 102C is disposed between the contact layer 120 and the bottomelectrode 104C. The contact layer 120 and bottom electrode 104 makeelectrical contact through the conductive material filling the vias 116.An electrical contact 122 may then provide series connection to anadjacent photovoltaic device (not shown) as described above.

The active layers 106 may include two or more layers with each layerhaving different charge-transfer properties than an adjacent layer. Inthe case of photovoltaic devices, the active layers 106 may include oneor more light-absorbing materials. The active layers 106 may includeorganic or inorganic semiconducting materials. Examples of suitableactive layer materials are described in commonly assigned U.S. patentapplication Ser. No. 10/782,017 entitled “SOLUTION-BASED FABRICATION OFPHOTOVOLTAIC CELL.”, the entire disclosures of which are incorporatedherein by reference, and in commonly assigned U.S. patent applicationSer. No. 10/443,456 entitled “PHOTOVOLTAIC DEVICES FABRICATED BY GROWTHFROM POROUS TEMPLATE”, the entire disclosures of which are incorporatedherein by reference, and in commonly assigned U.S. patent applicationSer. No. 60/390, 904 entitled “NANO-ARCHITECTED/ASSEMBLED SOLARELECTRICITY CELL”, the entire disclosures of which are incorporatedherein by reference. Further, the active layers 106 may be used as acomponent or components in an organic light emitting diode,electrochromic window, or other optoelectronic device.

Organic materials may be deposited by suitable wet coating techniques,e.g., spin-, dip-, spray-, or roll-to-roll coating, printing techniquessuch as screen-flexo-graphic, gravure, micro-gravure, and the like.Furthermore, organic materials may be deposited by Meyer-bar coating,blade coating, self-assembly or electrostatic self-assembly techniques.Wet coating techniques may be preceded by modification of the underlyingsurface with a plasma, UV-ozone, surface agent, surfactant,adhesion-promoter or other treatment to assure good uniform thickness ofthe coating and/or uniform wetting of the structure with a uniformthickness film of the organic material, e.g., by creating a high surfaceenergy, highly wetting surface. In addition, organic material coatingsmay be prepared by non-solution based techniques, such as evaporation orsublimation of molecules thermal evaporation or, more preferably,organic vapor phase deposition.

Examples of suitable inorganic materials include, e.g., metal oxidessuch as titania (TiO₂), zinc oxide (ZnO), copper oxide (CuO or Cu₂O orCu_(x)O_(y)), zirconium oxide, lanthanum oxide, niobium oxide, tinoxide, vanadium oxide, molybdenum oxide, tungsten oxide, strontiumoxide, calcium/titanium oxide and other oxides, sodium titanate,potassium niobate, cadmium selenide (CdSe), cadmium suflide (CdS),copper sulfide (e.g., Cu₂S), cadmium telluride (CdTe), cadmium-telluriumselenide (CdTeSe), copper-indium diselenide (CuInSe₂, CIS),copper-indium gallium diselenide (CuInGaSe₂, CIGS), cadmium oxide(CdO_(x)) silicon, amorphous silicon, III/V semiconductors, II/VIsemiconductors, CIGS, as well as blends or alloys of two or more suchmaterials. These materials may optionally be highly or lightly dopedwith n- or p-type dopants. Specific examples include layer structuressuch as (a) CdS, (b) CIGS, or CdS and (c) CdTe, or similar inorganic PVlayer structures generally known in the prior art. Inorganicsemiconductor coatings may be deposited by plating, electroplating,electro-deposition, sol, sol-gel, CVD, PECVD, metal organic CVD (MOCVD),sputtering, evaporation, close-space-sublimation, ALD,deposition/coating with precursor-inks and the like.

After the bottom electrode is coated with the active layer(s) 106additional processing steps may be necessary, e.g., annealing,reduction, conversion, surface treatments, selenization, doping, curing,anodization, sol-gel processing, polymer fill, re-crystallization,grain-boundary passivation, and any other process steps that may berequired for a given thin film optoelectronic device.

By way of example, and without limitation, if the optoelectronic deviceis to be a photovoltaic device, the active layers 106 may includematerial of the general formula CuIn_(1-x)Ga_(x)(S or Se)₂. Such a layermay be fabricated on the bottom electrode 104 by co-sputtering, or bydepositing a nanoparticle-based ink, paste or slurry, e.g., in a filmroughly 4 to 5 microns thick when wet. Examples of suchnanoparticle-based inks are described e.g., in U.S. patent applicationSer. No. ______, titled “SOLUTION-BASED FABRICATION OF PHOTOVOLTAICCELL” (Attorney Docket No. NSL-029), filed Feb. 19, 2004, which isincorporated herein by reference. The film may be annealed by heating toa temperature sufficient to burn off any binders or cap layers on theparticles and sinter the particles together. The resulting layer may beabout 1 micron to about 2 microns thick after annealing. Afterannealing, the film may optionally be exposed to selenium vapor at about300-500° C. for about 30-45 minutes to ensure the proper stochiometry ofSe in the film. To carry out such a Se vapor exposure, the film, ifdeposited on a flexible substrate, can be wound into a coil and the coilcan be coated so that the entire roll is exposed at the same time,substantially increasing the scaleability of the Se vapor exposureprocess. Examples of processing a coiled substrate are described e.g.,in U.S. patent application Ser. No., titled “HIGH THROUGHPUT SURFACETREATMENT ON COILED FLEXIBLE SUBSTRATES” (Attorney Docket No. NSL-025),which is incorporated herein by reference.

The active layers 106 may further include a window layer to smooth outthe “slope” between the bandgaps of the different materials making upthe CuIn_(1-x)Ga_(x)(S or Se)₂ layer. By way of example, the bandgapadjustment layer may include cadmium sulfide (CdS), zinc sulfide (ZnS),or zinc selenide (ZnSe) or some combination of two or more of these.Layers of these materials may be deposited, e.g., by chemical bathdeposition, to a thickness of about 50 nm to about 100 nm.

Alternatively, the optoelectronic device may be a light emitting device,such as an OLED. Examples of OLED's include light-emitting polymer (LEP)based devices. In such a case, the active layer(s) 106 may be Forexample, the active layer(s) 106 may include a layer of poly (3,4)ethylendioxythiophene:polystyrene sulfonate (PEDOT:PSS), which may bedeposited to a thickness of typically between 50 and 200 nm on thebottom electrode 104, e.g., by web coating or the like, and baked toremove water. PEDOT:PSS is available from Bayer Corporation ofLeverkusen, Germany. A polyfluorene based LEP may then be deposited onthe PEDOT:PSS layer (e.g., by web coating) to a thickness of about 60-70nm. Suitable polyfluorene-based LEPs are available from Dow ChemicalsCompany.

The top electrode layer 108 is often (though not invariably)transparent, or at least translucent. Examples of suitable transparentconducting materials for the top electrode layer 108 include transparentconductive oxides (TCO's) such as indium-tin-oxide, (ITO), or tin oxide,(with or without fluorine doping), zinc oxide, Al-doped zinc oxide, andthe like. Such TCO layers may be combined with metallic grids ofadditional lower resistance materials, such as e.g. screen-printedmetal-particle pastes (e.g. silver-paste). In addition, the topelectrode layer 108 may include a conductive polymer such as conductivepolythiophene, conductive polyaniline, conductive polypyrroles,PSS-doped PEDOT (e.g. Baytron™), a derivative of PEDOT, a derivative ofpolyaniline, a derivative of polypyrrole. In addition, conductivepolymers may be combined with metallic grids or wire arrays and/or a TCOto provide a transparent conductive electrode. Examples of suchconductive electrodes are described, e.g., in U.S. patent applicationSer. No. 10/429,261, entitled “IMPROVED TRANSPARENT ELECTRODE,OPTOELECTRONIC APPARATUS AND DEVICES”, the disclosures of which areincorporated herein by reference.

In addition to the steps described above, embodiments of the presentinvention may include other optional steps. For example, one or morelayers and/or patterns of low-resistance bus-bars may be formed adjacentto the top electrode layer 108 or bottom electrode layer 104 beforeand/or after the cutting the layered structure. Said low-resistance busbars, could, for example, be a printed comb-like structure with athicker base line running along the direction of the cut-up or to-becut-up stripes with perpendicular finer ‘fingers of the comb’ runningperpendicular as shown in FIG. 2A. Such bus bars may be, e.g., formedscreen printed conductive inks, metal/alloy layers deposited (e.g.evaporated) through a shadow mask or deposited (e.g., by evaporation,plating, electro-plating, electro-less plaiting, sputtering, CVD, andthe like). In addition, the bus-bars may be formed by subsequentpatterning (e.g. lithography), or could be laminated metal tapes, wires,meshes. The back-to-front series wiring between individual devices maybe connected to the bus-bars (e.g. via conductive adhesives, soldering,and the like).

There are several possible schemes to series connect optoelectronicdevice modules together. For example, as depicted in FIGS. 2A-2B, devicemodule sections 201A, 201B include optional substrate layer portions202A, 202B, bottom electrode layer portions 204A, 204B, active layerportions 206A, 206B and top electrode portions 208A, 208B. Trenchesfilled with electrically conductive material 212A, 212B are formedthrough the top electrode layer portions 208A, 208B and active layerportions 206A, 206B to make electrical contact with the bottom electrodelayer portions 202A, 202B. Trenches could be left open/bare, bepassivated or alternatively be filled with electrically insulatingmaterials 210A, 210B electrically isolate major areas 209A, 209B of thetop electrode layer portions 208A, 208B from the conductive material212A, 212B.

Note that electrically insulating material 210A, 210B and/or theelectrically conductive material 212A, 212B could be applied before,during or after cutting the layered structure, or partially beforeand/or partially after. The trenches may be filled with the electricallyconductive material 212A, 212B may be an electrically conductive inkdeposited, e.g., by printing (e.g., screen printing, flexographicprinting, microgravure printing and the like) or a metal deposited byevaporation or sputtering or by melting, soldering, welding or bondingthe series interconnect wire/mesh into the trench down to the bottomelectrode. The electrically conductive material 212A, 212B may also be aprinted (e.g. ink-jet, screen, flexo, etc.) conductive polymer (Pedot,Pani, polypyrole, etc.).

An electrically conductive tape 214 (as shown in FIG. 2A) or mesh 216(as shown in FIG. 2B) may then make electrical contact between theconductive material 212A of one device module section 201A and the majorarea 209B of the top electrode 208B of an adjacent device module section201B.

In a variation on the series connection scheme of FIGS. 2A-2B, thefunction of the top electrode layer portions of the modules 201A, 201Bmay be combined with the series interconnection. For example, as show inFIG. 2C, transparent conductive layers 218A, 218B, e.g., conductivepolymers, may be disposed such that they partially cover the activelayers 206A, 206B. Trenches filled with conductive material 212A, 212Bmay be formed in exposed portions of the active layers 206A, 206B thatare not covered by the transparent conductive layers 218A, 218B. Aconductive metal mesh 216 may electrically contact the conductivematerial 212A on one device module section 201A and substantially coverthe transparent conductive layer 218B on another module 201B. Theconductive layer 218A, 218B and metal mesh 216 may be deposited afterthe cutting step but could also be partially pre-deposited before thecutting step (e.g. over area 209A, 209B) with an additional metal mesh,foil, tape or wire that connects said mesh with adjacent 212A, 212B,etc. The combination of the metal mesh 216 and transparent conductivelayers 218A, 218B can provide highly conductive (i.e., low sheetresistance) transparent top electrode portions as well as acting asback-to-front series interconnects.

The back-to-front series wiring could also be done by overlapping a partof the bottom electrode (or substrate) of one device module with a partof the top electrode of an adjacent device module. An example of this isdepicted in FIG. 2D. Here, for example, device modules 221A, 221B eachhave substrate layers 222A, 222B, bottom electrode layers 224A, 224B,active layers 226A, 226B and top electrode layers 228A, 228B. A portionof the substrates 222A, 222B have been removed so that the bottomelectrode layer 222A of one device module 221A may contact the topelectrode layer 228B of an adjacent device module 221B. Note that if thesubstrate 222A is electrically conducting, it may make contact with thetop electrode layer 228B.

In some embodiments of the invention some of the layers in the layeredstructure may be patterned layers. For example, FIGS. 3A-3B illustratefabrication of an optolectronic device with patterned layers. As shownin FIG. 3A, a layered structure 300 may include an unpatterned substrate302 with an unpatterned bottom electrode layer 304. Patterned activelayer portions 306A, 306B, 306C may be may be formed on the electrodelayer 304. Patterned top electrode layer portions 308A, 308B, 308C maybe formed over the patterned active layer portions 306A, 306B, 306C. Thelayered structure 300 may then be cut as indicated by the arrows in FIG.3A to divide it into device modules 310A, 310B, 310C as shown in FIG.3B.

The active layer portions 306A, 306B, 306C may be formed, e.g., byprinting an ink (e.g. ink-based CIGS or CdTe cells), by printing apolymer or polymer/molecule blend or organic/inorganic blend (e.g. inorganic bulk-heterojunction PV cells or in a hybridorganic/inorganic-type cells (polymer plus inorganic semiconductorparticles, rods, tripods), or by printing a sol-gel. The printing may befollowed by any necessary treatment steps, e.g. anneal, reduction ofoxides, selenization, calcination, drying, recrystallization, and thelike. The active layer portions 306A, 306B, 306C may be printed ordeposited in a patterned manner (e.g. screen, flexo, etc.) or they maybe deposited over the bottom electrode layer as a single unpatternedactive layer which is subsequently post-patterned, e.g., by selectivelyremoving portions of the unpatterned layer. Alternatively, the activelayer portions 306A, 306B, 306C may be deposited over or in-between alaminated/printed spacer (e.g. spacer tape) that is subsequentlyremoved. The spacer may be removed before any annealing step or afterbut is generally done after the deposited film is dried sufficiently soit does not re-flow detrimentally. Individual active PV layers, fillers,etc. may have different patterning steps. The top electrode portions308A, 308B, 308C may be deposited on the active layer portions 306A,306B, 306C, e.g. via mask. Alternatively, a taped mask may be placedover selected portions of the bottom electrode layer 304 and/or theactive layer portions 306A, 306B, 306C. The top electrode portions maythen be deposited all over with post-patterning via removal of the tapedmask. Alternatively, laser scribing or lithographic patterning could beused.

Note that although FIG. 3A depicts a layer structure having anunpatterned bottom electrode layer 304, it is also possible for thebottom electrode layer to be patterned before the cutting step. Forexample strips of laminated tape or adhesive tape may be laid down as amask on the substrate 302 as a mask. A layer of conductive material,e.g. Mo or TCO may then be sputtered over the substrate and mask. Themask may then be peeled off leaving gaps between strips of conductivematerial. If the substrate 302 is made of an electrically insulatingmaterial, the gaps provide electrical separation of individual bottomelectrode layer portions.

As shown in FIGS. 3A-3B the active layer portions 306A, 306B and topelectrode portions 308A, 308B, 308C may be patterned in such a way as toleave of the bottom electrode portions 304A, 304B, 304C exposed afterthe cutting step. In such a case the bottom a simple conductor 314 suchas a foil or mesh may connect electrode portion 304A of one devicemodule 310A to the top electrode portion 308B of an adjacent module310B. Note that the cuts in FIGS. 3A and 3B do not have to be plane withthe edge of the 306 and 308 layers on one side. Alternatively, the cutscould be placed in between such as to leave exposed sections of 304 lefton both sides of the stripes 306/308. The same alternative placementcould be carried out for the arrangement FIG. 4.

FIG. 4 depicts a variation on the embodiment illustrated in FIGS. 3A-3B.Here an optoelectronic device 400 has been manufactured by cutting alayered structure into device modules 401A, 401B, 401C. The devicemodules include substrate portions 402A, 402B, 402C, bottom electrodeportions 404A, 404A, 404C and active layer portions 406A, 406A, 406C.Transparent conductive layers 408A, 408B, 408C and conductive mesh 414act as transparent top electrode portions. The conductive mesh 414 alsoprovides series electrical contact between, e.g., and exposed upperportion of bottom electrode 402B and transparent conductive layer 408Ain a manner similar to that described above with respect FIG. 3B. Themesh 414 and conductive layers 408A, 408B provide highly conductive andtransparent top electrode portions as described above with respect toFIG. 2C.

Other alternative embodiments may combine various different inventivefeatures described above. For example, it is possible to combinepre-patterning selected layers of a layered structure with protectingthe edges during cutting. As shown in FIG. 5A, a layered structure 500may include an unpattterned substrate 502 and unpatterned bottomelectrode layer 504. Patterned active layer portions 506A, 506B, 506Cmay be formed on the bottom electrode layer 504, e.g., as describedabove with respect to FIG. 3A. Protective insulating stripes 507 maythen be printed, laminated or otherwise stuck over the exposed edges ofthe active layer portions 506A, 506B, 506C. Note that all these drawingsare not to scale and the layers are very thin, e.g., a few micronsmaximum typically with the printed/laminated insulating stripes 507perhaps in the range of several 10s to several 100s of microns atmaximum. Then top electrode layer portions 508A, 508B, 508C may beformed on the active layer portions 506A, 506B, 506C in a patternedmanner, e.g., as described above with respect to FIG. 3A. Then thelayered structure 500 may be cut as indicated by the arrows to formindividual device module sections 510A, 510B, 510C, which may then bewired in series back-to-front series, e.g., as described above. Afterthe cutting step the edge of the substrate 502 and/or bottom electrode504 may be protected with e.g. tape, printed insulator etc. to preventshorts during back-to-front series wiring. Note that the material 507right at the cutting line may not be required. Alternatively, thematerial 507 could be present just at the edges of 506/508

FIG. 5B illustrates a variation on the embodiment depicted in FIG. 5A.In this embodiment, a layered structure 501 may include unpattternedsubstrate 502, unpatterned bottom electrode 504. Patterned active layerportions 506A, 506B, 506C may be formed on the bottom electrode portion504, e.g., as described above with respect to FIG. 3A. Protectiveinsulating stripes 507 may then be printed, laminated or otherwise stuckbetween the exposed edges of the active layer portions 506A, 506B, 506C.Note that all these drawings are not to scale and the layers are verythin, e.g., a few microns maximum typically with the printed/laminatedinsulating stripes 507 perhaps in the range of several 10s to several100s of microns at maximum. Then an unpatterned top electrode layer 508may be formed over the active layer portions 506A, 506B, 506C and theinsulating stripes 507. Then the layered structure 501 may be cut at thelocations of the insulating stripes 507 as indicated by the arrows toform individual device module sections, which may then be wired inseries back-to-front series, e.g., as described above.

While the above is a complete description of the preferred embodiment ofthe present invention, it is possible to use various alternatives,modifications and equivalents. Therefore, the scope of the presentinvention should be determined not with reference to the abovedescription but should, instead, be determined with reference to theappended claims, along with their full scope of equivalents. Theappended claims are not to be interpreted as includingmeans-plus-function limitations, unless such a limitation is explicitlyrecited in a given claim using the phrase “means for.”

1. A method of manufacturing a moisture resistive photovoltaic module,comprising: providing two or more solar cells, each of the two or moresolar cells having a back conductive surface and a front illuminatedconductive surface that includes an active region and a contactingregion, wherein a terminal layer that is conductive is disposed over thecontacting region; forming a solar cell circuit by electricallyinterconnecting the two or more solar cells using interconnects, whereina first end of each interconnect is attached to a portion of theterminal layer of each of the two or more solar cells to form a terminalstructure for each of the two or more solar cells; forming a surfacepreparation layer providing as smooth a surface as an active regionsurface smoothness of the front illuminated conductive surface over theterminal structure of each of the two or more solar cells withoutsubstantially extending the surface preparation layer over the activeregion, the surface preparation layer covering at least the first end ofthe conductor of each of the two or more solar cells; and forming amoisture barrier layer over the active region and the surfacepreparation layer of each of the two or more solar cells.
 2. The methodof claim 1 wherein the terminal layer comprises at least one busbar andfingers and the first end of the conductor is attached to the at leastone busbar. 3-4. (canceled)
 5. The method of claim 1, further comprisingencapsulating the solar cell circuit in a protective package.
 6. Themethod of claim 1, wherein the moisture barrier film comprises at leastone of polyethylene, polypropylene, polystyrene, poly(ethyleneterephthalate), polyimide, parylene, benzocyclobutene,polychlorotrifluoroethylene, silicon oxide, aluminum oxide, siliconnitride, aluminum nitride, silicon oxy-nitride, aluminum oxy-nitride,amorphous or polycrystalline silicon carbide, transparent ceramics, andcarbon doped oxide.
 7. The method of claim 1, wherein the step offorming the moisture barrier layer comprises a chemical vapor depositionprocess.
 8. The method of claim 7, wherein the chemical vapor depositionprocess is an atomic layer deposition process. 9-11. (canceled)
 12. Amethod of manufacturing a moisture resistive solar cell, comprising:providing a solar cell having a back surface and a front illuminatedconductive surface that includes an active region and a contactingregion, wherein a conductive terminal layer is disposed over thecontacting region; attaching a first end of a conductor to a portion ofthe conductive terminal layer of the solar cell to form a terminalstructure; forming a surface preparation layer providing as smooth asurface as an active region surface smoothness of the front illuminatedconductive surface over the terminal structure without substantiallyextending the surface preparation layer over the active region, thesurface preparation layer covering at least the first end of theconductor; and forming a moisture barrier layer over the active regionand the surface preparation layer.
 13. The method of claim 12, whereinthe conductive terminal layer comprises at least one busbar and fingersand the first end of the conductor is attached to the at least onebusbar. 14-15. (canceled)
 16. The method of claim 12, wherein themoisture barrier film comprises at least one of polyethylene,polypropylene, polystyrene, poly(ethylene terephthalate), polyimide,parylene, benzocyclobutene, polychlorotrifluoroethylene, silicon oxide,aluminum oxide, silicon nitride. aluminum nitride, silicon oxy-nitride,aluminum oxy-nitride, amorphous or polycrystalline silicon carbide,transparent ceramics, and carbon doped oxide.
 17. The method of claim12, wherein the step of forming the moisture barrier layer comprises achemical vapor deposition process.
 18. The method of claim 17, whereinthe chemical vapor deposition process is an atomic layer depositionprocess. 19-20. (canceled)
 21. A moisture resistive solar cell,comprising: a solar cell having a back surface and a front illuminatedconductive surface that includes an active region and a contactingregion over which a conductive terminal layer is disposed, wherein afirst end of a conductor is attached to a portion of the terminal layerof the solar cell to form a terminal structure; a surface preparationlayer that provides as smooth a surface as an active region surfacesmoothness of the front illuminated conductive surface formed over theterminal structure without substantially extending the surfacepreparation layer over the active region, the surface preparation layercovering at least the first end of the conductor; and a moisture barrierlayer formed over the active region and the surface preparation layer.22-26. (canceled)
 27. The solar cell of claim 21, wherein the moisturebarrier film comprises at least one of polyethylene, polypropylene,polystyrene, poly(ethylene terephthalate), polyimide, parylene,benzocyclobutene, polychlorotrifluoroethylene, silicon oxide, aluminumoxide, silicon nitride, aluminum nitride, silicon oxy-nitride, aluminumoxy-nitride, amorphous or polycrystalline silicon carbide, transparentceramics, and carbon doped oxide.
 28. (canceled)
 29. A moistureresistive photovoltaic module, comprising: a solar cell circuit formedby electrically interconnecting two or more solar cells usinginterconnects, each of the two or more solar cells having a backconductive surface and a front illuminated conductive surface thatincludes an active region and a contacting region over which aconductive terminal layer is disposed, wherein a first end of eachinterconnect is attached to a portion of the terminal layer of each ofthe two or more solar cells to form a terminal structure for each of thetwo or more solar cells; a surface preparation layer that provides assmooth a surface as an active region surface smoothness of the frontilluminated conductive surface formed over the terminal structurewithout extending over the active region, the surface preparation layercovering at least the first end of the conductor; and a moisture barrierlayer formed over the front illuminated surface of each solar cell andthe surface preparation layer. 30-31. (canceled)
 32. The photovoltaicmodule of claim 29, further comprising a protective package in which thesolar cell circuit is sealably embedded.
 33. The photovoltaic module ofclaim 29, wherein the terminal layer comprises at least one busbar andfingers and the first end of the conductor is attached to the at leastone busbar.
 34. (canceled)
 35. The solar cell of claim 33, wherein eachof the fingers are thinner in width than the at least one busbar, andwherein the surface preparation layer is disposed over only the busbar.36. The method of claim 29, wherein the moisture barrier film comprisesat least one of polyethylene. polypropylene, polystyrene, poly(ethyleneterephthalate), polyimide, parylene, benzocyclobutene,polychlorotrifluoroethylene, silicon oxide, aluminum oxide, siliconnitride aluminum nitride, silicon oxy-nitride, aluminum oxy-nitride,amorphous or polycrystalline silicon carbide, transparent ceramics, andcarbon doped oxide
 37. The method of claim 29, wherein the interconnectis a copper ribbon.